Design of a Compact 520 kV Nanosecond Marx Generator for High-Power Microwaves

This paper presents the design of a compact high-voltage Marx generator developed for nanosecond pulsed power and high-power microwave applications. The proposed system consists of a 26-stage Marx topology employing spark-gap switches and high-voltage capacitors, capable of delivering output pulses with a peak voltage up to 520 kV, a peak current of 22 kA, and a pulse duration of approximately 80 ns on a matched 25 Ω load. Circuit-level simulations and three-dimensional electromagnetic analysis show stable pulse generation, effective impedance matching, and negligible thermal stress under repetitive operation, making the proposed generator suitable for compact pulsed power systems and HPM-driven devices.