The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.
CALI', C., MACALUSO, R., MOSCA, M. (2001). Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target. OPTICS COMMUNICATIONS, 197(4-6), 341-354 [10.1016/S0030-4018(01)01459-6].
Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target
CALI', Claudio;MACALUSO, Roberto;MOSCA, Mauro
2001-01-01
Abstract
The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.File | Dimensione | Formato | |
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