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EnglishThe plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.
Cali', C., Macaluso, R., & Mosca, M. (2001). Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target. OPTICS COMMUNICATIONS, 197(4-6), 341-354 [10.1016/S0030-4018(01)01459-6].
| Data di pubblicazione: | 2001 | |
| Titolo: | Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target | |
| Autori: | ||
| Citazione: | Cali', C., Macaluso, R., & Mosca, M. (2001). Effects of the process conditions on the plume of a laser-irradiated indium-tin-oxide target. OPTICS COMMUNICATIONS, 197(4-6), 341-354 [10.1016/S0030-4018(01)01459-6]. | |
| Rivista: | ||
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1016/S0030-4018(01)01459-6 | |
| Abstract: | The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions. | |
| Settore Scientifico Disciplinare: | Settore ING-INF/01 - Elettronica | |
| Appare nelle tipologie: | 1.01 Articolo in rivista |
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