Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.
Di Franco, F., Zaffora, A., Santamaria, M., Di Quarto, F., Tsuji, E., Habazaki, H. (2015). The influence of composition on the solid state properties of anodic films on Al-Ta alloys. In ASST 2015 VII Aluminium Surface Science & Technology.
The influence of composition on the solid state properties of anodic films on Al-Ta alloys
DI FRANCO, Francesco;Zaffora, Andrea;SANTAMARIA, Monica;DI QUARTO, Francesco;
2015-01-01
Abstract
Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.
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