Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
F D'ACAPITO, C MAURIZIO, F GONELLA, E CATTARUZZA, G MATTEI, C MONDELLI, et al. (2004). On the use of grazing incidence small angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials. JOURNAL OF SYNCHROTRON RADIATION, 11(3), 272-277 [10.1107/S0909049504002523].
On the use of grazing incidence small angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials
MARTORANA, Antonino
2004-01-01
Abstract
Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
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