We have fabricated top illuminated resonant cavity enhanced (RCE) detectors by partially removing top-mirror pairs of a vertical-cavity surface-emitting laser (VCSEL) structure by etching. The observed maximum quantum efficiency is 73% with a spectral full-width at half-maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away 8 top-mirror pairs of a VCSEL structure, with 15.5 top-mirror pairs remaining. Spectral FWHM's as wide as 6.5 nm, with a peak efficiency of 36%, have been measured in the case of 4.5 top mirrors remaining. An increase in the 3-dB detector bandwidth up to 2.8 GHz is observed by reducing the active device diameter from 90 to 20 μm.
Knodl, T., Choy, H.K.H., Pan, J.L., King, R., Jager, R., Lullo, G., et al. (1999). RCE photodetectors based on VCSEL structures. IEEE PHOTONICS TECHNOLOGY LETTERS, 11(10), 1289-1291 [10.1109/68.789720].
RCE photodetectors based on VCSEL structures
Lullo, G.;
1999-10-01
Abstract
We have fabricated top illuminated resonant cavity enhanced (RCE) detectors by partially removing top-mirror pairs of a vertical-cavity surface-emitting laser (VCSEL) structure by etching. The observed maximum quantum efficiency is 73% with a spectral full-width at half-maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away 8 top-mirror pairs of a VCSEL structure, with 15.5 top-mirror pairs remaining. Spectral FWHM's as wide as 6.5 nm, with a peak efficiency of 36%, have been measured in the case of 4.5 top mirrors remaining. An increase in the 3-dB detector bandwidth up to 2.8 GHz is observed by reducing the active device diameter from 90 to 20 μm.
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