A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 μm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin freestanding noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology. © 2002 Optical Society of America.
Cusumano, P., Lullo, G., Mangione, A., Arnone, C. (2002). Graded reflectivity micromirror arrays. APPLIED OPTICS, 41(1), 143-147 [10.1364/ao.41.000143].
Graded reflectivity micromirror arrays
Cusumano, Pasquale
;Lullo, Giuseppe;Mangione, Angelo;Arnone, Claudio
2002-01-01
Abstract
A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 μm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin freestanding noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology. © 2002 Optical Society of America.
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