A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.
Lullo G., Arnone C., Giaconia G. C. (1997). Technologies for the fabrication of cylindrical fine line devices. MICROELECTRONIC ENGINEERING, 35(1-4), 417-420 [10.1016/S0167-9317(96)00118-9].
Technologies for the fabrication of cylindrical fine line devices
Lullo G.;Arnone C.;Giaconia G. C.
1997-02-01
Abstract
A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.
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