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EnglishIn our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described.
Lo Cicero, U., Arnone, C., Barbera, M., Collura, A., & Lullo, G. (2012). Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks. JOURNAL OF LOW TEMPERATURE PHYSICS, 167, 541-546.
| Data di pubblicazione: | 2012 |
| Titolo: | Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks |
| Autori: | |
| Citazione: | Lo Cicero, U., Arnone, C., Barbera, M., Collura, A., & Lullo, G. (2012). Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks. JOURNAL OF LOW TEMPERATURE PHYSICS, 167, 541-546. |
| Rivista: | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1007/s10909-011-0418-1 |
| Abstract: | In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described. |
| Settore Scientifico Disciplinare: | Settore ING-INF/01 - Elettronica |
| Appare nelle tipologie: | 1.01 Articolo in rivista |
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http://hdl.handle.net/10447/63651
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