We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.
Chianetta, G., Arnone, C., Barbera, M., Beeman, J., Collura, A., Lullo, G., et al. (2008). A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors. JOURNAL OF LOW TEMPERATURE PHYSICS, 151, 387-393 [10.1007/s10909-007-9662-9].
A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors
ARNONE, Claudio;BARBERA, Marco;LULLO, Giuseppe;
2008-01-01
Abstract
We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.
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