A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.
Arnone, C., Giaconia, G.C., Pace, C., Bonura, S., Greco, M. (1993). Laser Beam Lithography For 3-D Surface Patterning. In A.N.C. S. Martellucci (a cura di), Laser Applications for Mechanical Industry (pp. 315-320). Kluwer Academic Publishers [10.1007/978-94-011-1990-0_20].
Laser Beam Lithography For 3-D Surface Patterning
Arnone, C.;Giaconia, G. C.;Pace, C.;
1993-01-01
Abstract
A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.
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