A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited

Arnone C., Giaconia C., Pace C., Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21 [10.1108/eb044519].

Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

Arnone C.;Giaconia C.;Pace C.;
1994-01-01

Abstract

A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Settore ING-INF/01 - Elettronica
Arnone C., Giaconia C., Pace C., Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21 [10.1108/eb044519].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10447/425917
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