A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Arnone C., Giaconia C., Pace C., Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21 [10.1108/eb044519].
Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries
Arnone C.;Giaconia C.;Pace C.;
1994-01-01
Abstract
A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
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