Archivio istituzionale della ricerca dell'Università degli Studi di Palermo
IRIS è il sistema di gestione integrata dei dati della ricerca (persone, pubblicazioni, progetti, attività) adottato dall’Università di Palermo, e ha lo scopo di raccogliere, conservare, documentare, e diffondere ad accesso aperto le informazioni relative alla produzione scientifica degli autori afferenti all’Ateneo.
EnglishA recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Arnone C., Giaconia C., Pace C., & Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21 [10.1108/eb044519].
| Data di pubblicazione: | 1994 | |
| Titolo: | Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries | |
| Autori: | ||
| Citazione: | Arnone C., Giaconia C., Pace C., & Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21 [10.1108/eb044519]. | |
| Rivista: | ||
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1108/eb044519 | |
| Abstract: | A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited | |
| Settore Scientifico Disciplinare: | Settore ING-INF/01 - Elettronica | |
| Appare nelle tipologie: | 1.01 Articolo in rivista |
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