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EnglishA recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Arnone C., Giaconia C., Pace C., & Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21.
| Data di pubblicazione: | 1994 |
| Titolo: | Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries |
| Autori: | |
| Citazione: | Arnone C., Giaconia C., Pace C., & Greco M. (1994). Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries. MICROELECTRONICS INTERNATIONAL, 11(1), 18-21. |
| Rivista: | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1108/eb044519 |
| Abstract: | A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited |
| Settore Scientifico Disciplinare: | Settore ING-INF/01 - Elettronica |
| Appare nelle tipologie: | 1.01 Articolo in rivista |
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