A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
Mini L., Giaconia C., & Arnone C. (1994). Copper patterning on dielectrics by laser writing in liquid solution. APPLIED PHYSICS LETTERS, 64(25), 3404-3406 [10.1063/1.111292].
Copper patterning on dielectrics by laser writing in liquid solution
Giaconia C.;Arnone C.
1994
Abstract
A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
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