A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
Mini L., Giaconia C., Arnone C. (1994). Copper patterning on dielectrics by laser writing in liquid solution. APPLIED PHYSICS LETTERS, 64(25), 3404-3406 [10.1063/1.111292].
Copper patterning on dielectrics by laser writing in liquid solution
Giaconia C.;Arnone C.
1994-01-01
Abstract
A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
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