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EnglishA technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
Mini L., Giaconia C., & Arnone C. (1994). Copper patterning on dielectrics by laser writing in liquid solution. APPLIED PHYSICS LETTERS, 64(25), 3404-3406 [10.1063/1.111292].
| Data di pubblicazione: | 1994 | |
| Titolo: | Copper patterning on dielectrics by laser writing in liquid solution | |
| Autori: | ||
| Citazione: | Mini L., Giaconia C., & Arnone C. (1994). Copper patterning on dielectrics by laser writing in liquid solution. APPLIED PHYSICS LETTERS, 64(25), 3404-3406 [10.1063/1.111292]. | |
| Rivista: | ||
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1063/1.111292 | |
| Abstract: | A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications. | |
| Settore Scientifico Disciplinare: | Settore ING-INF/01 - Elettronica | |
| Appare nelle tipologie: | 1.01 Articolo in rivista |
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http://hdl.handle.net/10447/425915
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