A SCANDURRA, G F INDELLI, PIGNATARO B, S DI MARCO, M A DI STEFANO, S RAVESI, et al. (2007). Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications. SURFACE AND INTERFACE ANALYSIS, 2007, 1-5 [10.1002/sia.2681].

Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

PIGNATARO, Bruno Giuseppe;DI MARCO, Salvatore;
2007-01-01

2007
A SCANDURRA, G F INDELLI, PIGNATARO B, S DI MARCO, M A DI STEFANO, S RAVESI, et al. (2007). Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications. SURFACE AND INTERFACE ANALYSIS, 2007, 1-5 [10.1002/sia.2681].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10447/25086
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