We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.
Lo Cicero, U., Arnone, C., Barbera, M., Collura, A., Lullo, G., Perinati, E., et al. (2009). Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication. In AIP Conf. Proc., December 16, 2009, Volume 1185, pp. 112-114 (pp.112-114) [10.1063/1.3292295].
Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication
ARNONE, Claudio;BARBERA, Marco;LULLO, Giuseppe;
2009-01-01
Abstract
We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.
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