By electrical measurements we investigate the charge trapping and the charge transport in MOS capacitors in which the gate oxide has been replaced with a silicon rich oxide (SRO) film sandwiched between two thin SiO2 layers.

Crupi, I., Lombardo, S., Gerardi, C., Fazio, B., Vulpio, M., Rimini, E., et al. (2002). Nanocrystal MOS with silicon-rich oxide. In Solid State Phenomena (pp.675-680). Trans Tech Publications Ltd.

Nanocrystal MOS with silicon-rich oxide

Crupi, Isodiana;
2002-01-01

Abstract

By electrical measurements we investigate the charge trapping and the charge transport in MOS capacitors in which the gate oxide has been replaced with a silicon rich oxide (SRO) film sandwiched between two thin SiO2 layers.
Settore ING-INF/01 - Elettronica
Gettering and Defect Engineering in Semiconductor Technology 2001
S. Tecla, ita
2001
2002
6
http://www.ttp.net
Crupi, I., Lombardo, S., Gerardi, C., Fazio, B., Vulpio, M., Rimini, E., et al. (2002). Nanocrystal MOS with silicon-rich oxide. In Solid State Phenomena (pp.675-680). Trans Tech Publications Ltd.
Proceedings (atti dei congressi)
Crupi, I.; Lombardo, S.; Gerardi, C.; Fazio, B.; Vulpio, M.; Rimini, E.; Melanotte, M.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10447/179620
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