Solar blind detectors have been fabricated based on AlGaN heterostructures grown on sapphire by molecular beam epitaxy or chemical vapour deposition. MSM and Schottky detectors were investigated. High performance devices have been obtained thanks to an optimization of the material crystalline quality (including the suppression of cracks) and of the process. We show that the spectral limitations of MSM detectors are dictated by intrinsic phenomena that are analysed in details while the responsivity and detectivity also depends on the technological process with a special emphasis on the geometry of finger and contact pads. One and two dimensional arrays have been fabricated and preliminary results are given. © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

J-Y DUBOZ, N GRANDJEAN, F OMNES, J-L REVERCHON, MOSCA M (2005). Solar Blind Detectors Based on AlGaN Grown on Sapphire. In E-MRS 2004 Fall Meeting Symposia C and F (pp.964-971) [10.1002/pssc.200460603].

Solar Blind Detectors Based on AlGaN Grown on Sapphire

MOSCA, Mauro
2005-01-01

Abstract

Solar blind detectors have been fabricated based on AlGaN heterostructures grown on sapphire by molecular beam epitaxy or chemical vapour deposition. MSM and Schottky detectors were investigated. High performance devices have been obtained thanks to an optimization of the material crystalline quality (including the suppression of cracks) and of the process. We show that the spectral limitations of MSM detectors are dictated by intrinsic phenomena that are analysed in details while the responsivity and detectivity also depends on the technological process with a special emphasis on the geometry of finger and contact pads. One and two dimensional arrays have been fabricated and preliminary results are given. © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Symposium on Science and Technology of Nitrides and Related Materials/Wide Band Gap II-VI Semiconductors held at the E-MRS 2004 Fall Meeting
Warsaw (POLAND)
6-10 september 2004
2005
8
INVITED PAPER
J-Y DUBOZ, N GRANDJEAN, F OMNES, J-L REVERCHON, MOSCA M (2005). Solar Blind Detectors Based on AlGaN Grown on Sapphire. In E-MRS 2004 Fall Meeting Symposia C and F (pp.964-971) [10.1002/pssc.200460603].
Proceedings (atti dei congressi)
J-Y DUBOZ; N GRANDJEAN; F OMNES; J-L REVERCHON; MOSCA M
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10447/34289
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